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EE 404 Introduction to Microelectromechanical Systems
Fundamentals of MEMS fabrication techonology, sensor component design and system integration issues are main focus this course. Advantages and disadvantages, application (automotive, defense, aerospace, microfluidics, biotech, medical, etc.), commercialization, manufacturability, packaging, and interfacing of the techonology are also covered. A design project is assigned via case study in this class.
SU Credits : 3.000
ECTS Credit : 6.000
Prerequisite : -
Corequisite :