Fundamentals of MEMS fabrication techonology, sensor component design and system integration issues are main focus this course. Advantages and disadvantages, application (automotive, defense, aerospace, microfluidics, biotech, medical, etc.), commercialization, manufacturability, packaging, and interfacing of the techonology are also covered. A design project is assigned via case study in this class.
SU Credits : 3.000
ECTS Credit : 6.000
Prerequisite :
Undergraduate level ENS 203 Minimum Grade of D
Undergraduate level ENS 203 Minimum Grade of D
Corequisite :
EE 404L
EE 404L