This course aims to teach students advanced modeling and analysis of mechanical, electrostatic, magnetostatic, fluidic, thermal, and optical properties and performance of micro and nano devices. Topics include: mechanical behavior, static deformation, resonance characteristics, and elastic properties of microsystems and devices; micro flows, flow in micro scales, lubrication in micromechanical structures, viscous damping, continuum hypothesis, and molecular flows; dissipation and heat transfer in microsystems; electrostatic, piezoelectric, magneto restrictive, magnetic, thermo mechanical, hydro pneumatic, and electro rheological actuators and energy conversion.