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ME 409 Foundations of Microsystems Select Term:
This course deals with modeling micromechanical systems, micromotion, and transport in the microscopic world. Spacific topics include: micron and sub-micron positioning technology; ultra precision; kinematics and dynamics of micromotion; modeling microactuators and microsensors; micro-flows and heat transfer; MEMS CAD systems.
SU Credits : 3.000
ECTS Credit : 7.000
Prerequisite : -
Corequisite : ME 409