ME 409 Foundations of Microsystems Select Term:
This course deals with modeling micromechanical systems, micromotion, and transport in the microscopic world. Spacific topics include: micron and sub-micron positioning technology; ultra precision; kinematics and dynamics of micromotion; modeling microactuators and microsensors; micro-flows and heat transfer; MEMS CAD systems.
SU Credits : 3.000
ECTS Credit : 7.000
Prerequisite : -
Corequisite :
ME 409R