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TR EN
MAT 406 Nanoengineered Systems Fabrication
MAT406 will detail top down and bottom up approaches for nanoengineered systems fabrication. It covers nanolitography / nanofabrication techniques, the fundamentals of shaping materials, nanoscale, lithography, nanoimprint lithography, step-and-flash lithography, unconventional fabrication techniques, charged particles lithography, and metrology. Etching, patterning and pattern transfer. Bottom up approaches, such as CVD, ALD, surface functionalization and and patterning. Self-assembly techniques, like atomic, polymeric, colloidal, biological, interfacial. 3D printing. Nanostructured materials synthesis as building blocks of nanosystems such as; nanoparticle, nanotube, nanosheet, vesicle, wire etc. Nanomedicine, drug delivery systems and nanosystems for clinical diagnostics. Health and safety aspects of nanoengineering fabrication methods.
SU Credits : 3.000
ECTS Credit : 5.000
Prerequisite : Undergraduate level NS 218 Minimum Grade of D
Corequisite : -