Semiconductor growth; material characterization; lithography tools; photo-resist models; thin film deposition; chemical etching and plasma etching; electrical contact formation; microstructure processing; and process modeling.
SU Credits : 3.000
ECTS Credit : 6.000
Prerequisite :
Undergraduate level EL 204 Minimum Grade of D
OR Undergraduate level EE 307 Minimum Grade of D
Corequisite :
EE 407L