This course deals with micromotion systems and micromechanic Specific topics include: micron and sub-micron positioning technology; elements of ultra precision; micro sensors and actuators; multi-axis precision control; miniature part handling; kinematics and dynamics of micromotion; electrostatic, piezo and voice coil microactuators, microsensing, micro-vibrations; MEMS CAD systems; effect of noise and environmental influences on interface characterist case studies. Design project will emphasize the control of micromotion.