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Micro/Nano Devices and Systems Lab

We employ our broad expertise in micro/nanofabrication technologies and develop miniaturized devices, sensors & actuators in an effort to solve interdisciplinary problems in biomedical sciences, electronics and nanotechnology.

We have four research thrust areas:

I. Micro/Nano Electro Mechanical Systems (M/NEMS), Micro Sensors and Actuators

II. Novel Micro/Nanofabrication Techniques, Scanning Probe-based Nanotechnology

III. Biosensors, Biomedical Microsystems and Devices, Microfluidic Systems

IV. Electronic Devices, CMOS-MEMS and Nanomaterial (e.g. graphene) Integration

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