Course Catalog

EE 626 Microelectromechanical Systems (MEMS)	3 Credits
The course includes a summary of integrated circuit fabrication technologies leading into an overview of the technologies available to shape electromechanical elements on a submillimeter scale. Physics of MEMS devices will be covered at a level necessary to design and analyze new devices and systems. Electronic interfacing, mechanical and electrical noise, fundamental limits of CAD tools, layout, process simulation.
Last Offered Terms Course Name SU Credit Spring 2023-2024 Microelectromechanical Systems (MEMS) 3 Spring 2022-2023 Microelectromechanical Systems (MEMS) 3 Spring 2021-2022 Microelectromechanical Systems (MEMS) 3 Spring 2020-2021 Microelectromechanical Systems (MEMS) 3 Spring 2019-2020 Microelectromechanical Systems (MEMS) 3 Spring 2018-2019 Microelectromechanical Systems (MEMS) 3 Spring 2017-2018 Microelectromechanical Systems (MEMS) 3 Spring 2016-2017 Microelectromechanical Systems (MEMS) 3 Spring 2015-2016 Microelectromechanical Systems (MEMS) 3 Spring 2014-2015 Microelectromechanical Systems (MEMS) 3 Fall 2012-2013 Microelectromechanical Systems (MEMS) 3 Fall 2011-2012 Microelectromechanical Systems (MEMS) 3 Fall 2006-2007 Microelectromechanical Systems (MEMS) 3 Fall 2005-2006 Microelectromechanical Systems (MEMS) 3 Fall 2004-2005 Microelectromechanical Systems (MEMS) 3 Spring 2002-2003 Microelectromechanical Systems (MEMS) 3 Spring 2001-2002 Microelectromechanical Systems (MEMS) 3 Spring 2000-2001 Microelectromechanical Systems (MEMS) 3
Prerequisite: __
Corequisite: EE 626L
ECTS Credit: 10 ECTS (10 ECTS for students admitted before 2013-14 Academic Year)
General Requirements: