Course Catalog
| EE 534 Integrated Sensors | 3 Credits | ||||||||||||||||||
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| Fundamental principles and design of integrated solid-state sensors and sensing systems. Micromachining and wafer bonding. Microstructures for the measurement of visible and infrared radiation, pressure, acceleration, temperature, gas purity, an ion concentrations. Merged process technologies for sensors and circuits. Data acquisition circuits, micro-actuators and integrated microsystems. | |||||||||||||||||||
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| Prerequisite: __ | |||||||||||||||||||
| Corequisite: __ | |||||||||||||||||||
| ECTS Credit: 10 ECTS (10 ECTS for students admitted before 2013-14 Academic Year) | |||||||||||||||||||
| General Requirements: | |||||||||||||||||||