Course Catalog

EE 533 Semiconductor Process Technology	3 Credits
Theoretical analysis of the chemistry and physics of process technologies used in micro-electronics fabrication. Topics include semiconductor growth, material characterization, lithography tools, photo-resist models, thin film deposition, chemical etching, plasma etching, electrical contact formation, microstructure processing and process modeling.
Last Offered Terms Course Name SU Credit Fall 2023-2024 Semiconductor Process Technology 3 Fall 2022-2023 Semiconductor Process Technology 3 Fall 2021-2022 Semiconductor Process Technology 3 Fall 2020-2021 Semiconductor Process Technology 3 Fall 2019-2020 Semiconductor Process Technology 3 Fall 2018-2019 Semiconductor Process Technology 3 Fall 2017-2018 Semiconductor Process Technology 3 Fall 2016-2017 Semiconductor Process Technology 3 Fall 2015-2016 Semiconductor Process Technology 3 Fall 2014-2015 Semiconductor Process Technology 3 Spring 2013-2014 Semiconductor Process Technology 3 Spring 2012-2013 Semiconductor Process Technology 3 Fall 2011-2012 Semiconductor Process Technology 3 Spring 2009-2010 Semiconductor Process Technology 3 Spring 2006-2007 Semiconductor Process Technology 3 Spring 2004-2005 Semiconductor Process Technology 3 Fall 2003-2004 Semiconductor Process Technology 3 Fall 2002-2003 Semiconductor Process Technology 3 Fall 2001-2002 Semiconductor Process Technology 3 Fall 2000-2001 Semiconductor Process Technology 3
Prerequisite: __
Corequisite: EE 533L
ECTS Credit: 10 ECTS (10 ECTS for students admitted before 2013-14 Academic Year)
General Requirements: