- Micro/Nano Devices and Systems Lab
Micro/Nano Devices and Systems Lab
We employ our broad expertise in micro/nanofabrication technologies and develop miniaturized devices, sensors & actuators in an effort to solve interdisciplinary problems in biomedical sciences, electronics and nanotechnology.
We have four research thrust areas:
I. Micro/Nano Electro Mechanical Systems (M/NEMS), Micro Sensors and Actuators
II. Novel Micro/Nanofabrication Techniques, Scanning Probe-based Nanotechnology
III. Biosensors, Biomedical Microsystems and Devices, Microfluidic Systems
IV. Electronic Devices, CMOS-MEMS and Nanomaterial (e.g. graphene) Integration