Introduction to Microelectromechanical Systems (EE 404)

2023 Spring
Faculty of Engineering and Natural Sciences
Electronics Engineering(EE)
Murat Kaya Yapıcı,
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Formal lecture,Recitation,Laboratory
Interactive,Project based learning,Simulation
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Fundamentals of MEMS fabrication techonology, sensor component design and system integration issues are main focus this course. Advantages and disadvantages, application (automotive, defense, aerospace, microfluidics, biotech, medical, etc.), commercialization, manufacturability, packaging, and interfacing of the techonology are also covered. A design project is assigned via case study in this class.


This course will cover the theory and principles of major sensing/actuation mechanisms (including electrostatic, piezoelectric, thermal, piezorezistive, electromagnetic) and electromechanical concepts which are relevant for the design of MEMS devices, micro sensors and actuators. The course will teach the basic design principles for MEMS and micro/nanoscale devices, will discuss the important application areas of MEMS (RF, Bio, Optics) and nanotechnology; as well as, the fundamental principles of microfabrication and micromachining techniques for micro/nano devices and systems.


  • To be able to explain the fundamental theory, design and working principles of Micro/Nano Electromechanical Systems (MEMS/NEMS) and microsystems.
  • To be able to identify optimal microfabrication, micromachining, packaging techniques and process flows for micro devices and systems; and distinguish the design, fabrication and packaging techniques applicable to microsystems from those for integrated circuits.
  • To be able to explain the different sensing an actuation methods including electrostatic, magnetic, piezoelectric, piezoresistive, thermal principles relevant to the design and operation of MEMS sensors and actuators.
  • To understand the relevant engineering science topics relating to MEMS and microsystems, learn the scaling laws for miniaturization and be able to handle mechanical systems engineering design of micro scale devices.
  • To become familiar with the materials, in particular, silicon and its compounds for MEMS, and be able to identify the optimal materials for an intended application based on the fabrication requirements, material properties, and material compatibilities.
  • To learn the different application areas of MEMS and the MEMS technology market including RF-MEMS, BIO-MEMS and Optical MEMS (MOEMS).
  • To learn the fundamentals of nanotechnology, nanofabrication and the interplay between MEMS and nanosciences.


1. Understand the world, their country, their society, as well as themselves and have awareness of ethical problems, social rights, values and responsibility to the self and to others. 4

2. Understand different disciplines from natural and social sciences to mathematics and art, and develop interdisciplinary approaches in thinking and practice. 5

3. Think critically, follow innovations and developments in science and technology, demonstrate personal and organizational entrepreneurship and engage in life-long learning in various subjects; have the ability to continue to educate him/herself. 5

4. Communicate effectively in Turkish and English by oral, written, graphical and technological means. 5

5. Take individual and team responsibility, function effectively and respectively as an individual and a member or a leader of a team; and have the skills to work effectively in multi-disciplinary teams. 4

1. Possess sufficient knowledge of mathematics, science and program-specific engineering topics; use theoretical and applied knowledge of these areas in complex engineering problems. 5

2. Identify, define, formulate and solve complex engineering problems; choose and apply suitable analysis and modeling methods for this purpose. 4

3. Develop, choose and use modern techniques and tools that are needed for analysis and solution of complex problems faced in engineering applications; possess knowledge of standards used in engineering applications; use information technologies effectively. 3

4. Have the ability to design a complex system, process, instrument or a product under realistic constraints and conditions, with the goal of fulfilling specified needs; apply modern design techniques for this purpose. 5

5. Design and conduct experiments, collect data, analyze and interpret the results to investigate complex engineering problems or program-specific research areas. 5

6. Possess knowledge of business practices such as project management, risk management and change management; awareness on innovation; knowledge of sustainable development. 4

7. Possess knowledge of impact of engineering solutions in a global, economic, environmental, health and societal context; knowledge of contemporary issues; awareness on legal outcomes of engineering solutions; knowledge of behavior according to ethical principles, understanding of professional and ethical responsibility. 4

8. Have the ability to write effective reports and comprehend written reports, prepare design and production reports, make effective presentations, and give and receive clear and intelligible instructions. 5

1. Comprehend key concepts in biology and physiology, with emphasis on molecular genetics, biochemistry and molecular and cell biology as well as advanced mathematics and statistics. 2

2. Develop conceptual background for interfacing of biology with engineering for a professional awareness of contemporary biological research questions and the experimental and theoretical methods used to address them. 4

1. Use mathematics (including derivative and integral calculations, probability and statistics, differential equations, linear algebra, complex variables and discrete mathematics), basic sciences, computer and programming, and electronics engineering knowledge to (a) Design and analyze complex electronic circuits, instruments, software and electronics systems with hardware/software or (b) Design and analyze communication networks and systems, signal processing algorithms or software 5

1. Applying fundamental and advanced knowledge of natural sciences as well as engineering principles to develop and design new materials and establish the relation between internal structure and physical properties using experimental, computational and theoretical tools. 4

2. Merging the existing knowledge on physical properties, design limits and fabrication methods in materials selection for a particular application or to resolve material performance related problems. 5

3. Predicting and understanding the behavior of a material under use in a specific environment knowing the internal structure or vice versa. 3

1. Familiarity with concepts in statistics and optimization, knowledge in basic differential and integral calculus, linear algebra, differential equations, complex variables, multi-variable calculus, as well as physics and computer science, and ability to use this knowledge in modeling, design and analysis of complex dynamical systems containing hardware and software components. 2

2. Ability to work in design, implementation and integration of engineering applications, such as electronic, mechanical, electromechanical, control and computer systems that contain software and hardware components, including sensors, actuators and controllers. 5


  Percentage (%)
Midterm 30
Participation 10
Individual Project 40
Other 20



*Foundations of MEMS, 2nd edition, by Chang Liu, Pearson, Essex, England, 2012. (ISBN-10: 0273752243, ISBN-13: 9780273752240)


*MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering,
2nd edition, by Tai-Ran Hsu, John Wiley & Sons, Inc., Hoboken, NJ. 2008
(ISBN 978-0-470-08301-7)

* Fundamentals of Microfabrications: The Science of Miniaturization,? Marc J.Madou, Taylor & Francis, Inc., 2002 (ISBN 9780849308260

* Micromachined Transducers Sourcebook,? G. Kovacs, McGraw-Hill, 1998.

* Microchip Fabrication,? 3rd ed., Peter van Zant, McGraw-Hill, 1997.