Foundations of Microsystems (ME 409)

2023 Fall
Faculty of Engineering and Natural Sciences
6/7 ECTS (for students admitted in the 2013-14 Academic Year or following years)
Ali Koşar,
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Formal lecture,Interactive lecture,Seminar,On-line task/distance,Laboratory
Interactive,Learner centered,Communicative,Discussion based learning,Task based learning
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This course deals with modeling micromechanical systems, micromotion, and transport in the microscopic world. Spacific topics include: micron and sub-micron positioning technology; ultra precision; kinematics and dynamics of micromotion; modeling microactuators and microsensors; micro-flows and heat transfer; MEMS CAD systems.


* To give a broad introduction to microsystems technology
* To give students an opportunity to study the current literature
* To provide understanding in theory and analysis on microsystems
* To help students gaining insight into microsystems design


  • Comprehend microsystems technology (Program outcome1)
  • Show knowledge on basic solid mechanics and fluid mechanics in microdomains (Program outcome 1)
  • Gain broad information on the current literature about microsystems (Program outcome 1)
  • Define important issues on microsystems design and working principle of microsystems (Program outcome 2)
  • Choose appropriate fabrication method of any microsystem (Program outcome 2)
  • Use suitable tools to analyze and model microsystems (Program outcome 2)
  • Choose appropriate material for any microsystem and packaging method any microsystem (Program outcome 2)
  • Improve their skills using computer tools such as MATLAB and COMSOL to solve solid mechanics and fluid flow problems through a term project (Program outcome 2)
  • Develop skills to analytically and numerically model microsystems (Program outcome 2)
  • Develop problem solving and designing skills (Program outcome 2)
  • Use their knowledge on thermal fluid science and solid mechanics to design viable microsystems (Program outcome 2)


1. Understand the world, their country, their society, as well as themselves and have awareness of ethical problems, social rights, values and responsibility to the self and to others. 1

2. Understand different disciplines from natural and social sciences to mathematics and art, and develop interdisciplinary approaches in thinking and practice. 5

3. Think critically, follow innovations and developments in science and technology, demonstrate personal and organizational entrepreneurship and engage in life-long learning in various subjects; have the ability to continue to educate him/herself. 4

4. Communicate effectively in Turkish and English by oral, written, graphical and technological means. 5

5. Take individual and team responsibility, function effectively and respectively as an individual and a member or a leader of a team; and have the skills to work effectively in multi-disciplinary teams. 4

1. Possess sufficient knowledge of mathematics, science and program-specific engineering topics; use theoretical and applied knowledge of these areas in complex engineering problems. 5

2. Identify, define, formulate and solve complex engineering problems; choose and apply suitable analysis and modeling methods for this purpose. 5

3. Develop, choose and use modern techniques and tools that are needed for analysis and solution of complex problems faced in engineering applications; possess knowledge of standards used in engineering applications; use information technologies effectively. 4

4. Have the ability to design a complex system, process, instrument or a product under realistic constraints and conditions, with the goal of fulfilling specified needs; apply modern design techniques for this purpose. 4

5. Design and conduct experiments, collect data, analyze and interpret the results to investigate complex engineering problems or program-specific research areas. 4

6. Possess knowledge of business practices such as project management, risk management and change management; awareness on innovation; knowledge of sustainable development. 2

7. Possess knowledge of impact of engineering solutions in a global, economic, environmental, health and societal context; knowledge of contemporary issues; awareness on legal outcomes of engineering solutions; knowledge of behavior according to ethical principles, understanding of professional and ethical responsibility. 3

8. Have the ability to write effective reports and comprehend written reports, prepare design and production reports, make effective presentations, and give and receive clear and intelligible instructions. 4

1. Comprehend key concepts in biology and physiology, with emphasis on molecular genetics, biochemistry and molecular and cell biology as well as advanced mathematics and statistics. 2

2. Develop conceptual background for interfacing of biology with engineering for a professional awareness of contemporary biological research questions and the experimental and theoretical methods used to address them. 2

1. Applying fundamental and advanced knowledge of natural sciences as well as engineering principles to develop and design new materials and establish the relation between internal structure and physical properties using experimental, computational and theoretical tools. 3

2. Merging the existing knowledge on physical properties, design limits and fabrication methods in materials selection for a particular application or to resolve material performance related problems. 3

3. Predicting and understanding the behavior of a material under use in a specific environment knowing the internal structure or vice versa. 3

1. Familiarity with concepts in statistics and optimization, knowledge in basic differential and integral calculus, linear algebra, differential equations, complex variables, multi-variable calculus, as well as physics and computer science, and ability to use this knowledge in modeling, design and analysis of complex dynamical systems containing hardware and software components. 5

2. Ability to work in design, implementation and integration of engineering applications, such as electronic, mechanical, electromechanical, control and computer systems that contain software and hardware components, including sensors, actuators and controllers. 5


  Percentage (%)
Quiz 40
Participation 20
Group Project 20
Homework 20



Microsystems Design, Stephen D. Senturia, 2001, ISBN 0792372468

? J. Microelectromechanical Systems (IEEE/ASME)
? Sensors and Actuators (Elsevier)
? J. Micromechanics and Microengineering (IOP)
? Micromechanics and Microengineering