Microelectromechanical Systems (MEMS) (EE 626)

2021 Spring
Faculty of Engineering and Natural Sciences
Electronics Engineering(EE)
3
10.00
Murat Kaya Yapıcı -mkyapici@sabanciuniv.edu,
English
Doctoral, Master
--
Formal lecture,Recitation,Laboratory
Interactive,Project based learning
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CONTENT

The course includes a summary of integrated circuit fabrication technologies leading into an overview of the technologies available to shape electromechanical elements on a submillimeter scale. Physics of MEMS devices will be covered at a level necessary to design and analyze new devices and systems. Electronic interfacing, mechanical and electrical noise, fundamental limits of CAD tools, layout, process simulation.

OBJECTIVE

Refer to the course content

LEARNING OUTCOME

To be able to explain what MEMS and microsystems are.
To explain the working principles of many MEMS and microsystems in the
marketplace.

To understand the relevant engineering science topics relating to MEMS and
microsystems.

To be able to distinguish the design, manufacture and packaging techniques applicable to microsystems from those for integrated circuits.
To become familiar with the materials, in particular, silicon and its compounds for MEMS.
To be able to explain the basic and relevant design principles of MEMS and
microsystems.

To learn the scaling laws for miniaturization.
To be able to identify the optimal microfabrication and packaging techniques for micro devices and systems.
To be able to handle mechanical systems engineering design of micro scale devices.
To learn the fundamentals of nanotechnology.

ASSESSMENT METHODS and CRITERIA

  Percentage (%)
Midterm 30
Exam 25
Individual Project 35
Homework 10

RECOMENDED or REQUIRED READINGS

Textbook

* Foundation of MEMS, 2nd edition, by Chang Liu, Pearson, Essex, England, 2012. (ISBN-10: 0273752243, ISBN-13: 9780273752240)

Readings

* MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering,
2nd edition, by Tai-Ran Hsu, John Wiley & Sons, Inc., Hoboken, NJ. 2008
(ISBN 978-0-470-08301-7)

* Fundamentals of Microfabrications: The Science of Miniaturization,? Marc J.Madou, Taylor & Francis, Inc., 2002 (ISBN 9780849308260

* Micromachined Transducers Sourcebook,? G. Kovacs, McGraw-Hill, 1998.

* Microchip Fabrication,? 3rd ed., Peter van Zant, McGraw-Hill, 1997.