The course includes a summary of integrated circuit fabrication technologies leading into an overview of the technologies available to shape electromechanical elements on a submillimeter scale. Physics of MEMS devices will be covered at a level necessary to design and analyze new devices and systems. Electronic interfacing, mechanical and electrical noise, fundamental limits of CAD tools, layout, process simulation.
Microelectromechanical Systems (MEMS) (EE 626)
2021 Spring
Faculty of Engineering and Natural Sciences
Electronics Engineering(EE)
3
10.00
Murat Kaya Yapıcı -mkyapici@sabanciuniv.edu,
English
Doctoral, Master
--
Formal lecture,Recitation,Laboratory
Interactive,Project based learning
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| Programs\Type | Required | Core Elective | Area Elective |
| MA-European Studies | |||
| MA-European Studies-Non Thesis | |||
| MA-Political Science | |||
| MA-Political Science-Non Thes | |||
| MA-Visual Arts&Vis. Com Des-NT | |||
| MA-Visual Arts&Visual Com Des | |||
| MS-Bio. Sci. & Bioeng. LFI | |||
| MS-Bio. Sci. & Bioeng. LFI-ENG | |||
| MS-Biological Sci&Bioeng. | * | ||
| MS-Computer Sci.&Eng. LFI | |||
| MS-Computer Sci.&Eng. LFI-ENG | |||
| MS-Computer Science and Eng. | * | ||
| MS-Cyber Security(with thesis) | * | ||
| MS-Data Science | |||
| MS-Elec. Eng&Comp Sc.LFI-ENG | |||
| MS-Electronics Eng&Comp Sc.LFI | |||
| MS-Electronics Eng&Computer Sc | * | ||
| MS-Electronics Eng. | * | ||
| MS-Electronics Eng. LFI | |||
| MS-Electronics Eng. LFI-ENG | |||
| MS-Energy Techno.&Man. | * | ||
| MS-Industrial Eng. LFI-ENG | |||
| MS-Industrial Engineering | * | ||
| MS-Industrial Engineering LFI | |||
| MS-Manufacturing Eng-Non Thes | * | ||
| MS-Manufacturing Engineering | * | ||
| MS-Materials Sci & Engineering | * | ||
| MS-Materials Sci. & Eng. LFI | |||
| MS-Materials Sci.&Eng. LFI-ENG | |||
| MS-Mathematics | |||
| MS-Mechatronics | * | ||
| MS-Mechatronics LFI | |||
| MS-Mechatronics LFI-ENG | |||
| MS-Physics | |||
| MS-Physics-Non Thesis | * | ||
| MS-Psychology | |||
| MS-Psychology-Non Thesis | |||
| PHD-Biological Sci&Bioeng. | * | ||
| PHD-Comp. Sci and Eng.after UG | * | ||
| PHD-Computer Science and Eng. | * | ||
| PHD-Cyber Security | * | ||
| PHD-Electronics Eng&ComputerSc | * | ||
| PHD-Electronics Eng. | * | ||
| PHD-Electronics Eng. after UG | * | ||
| PHD-Experimental Psychology | |||
| PHD-Industrial Engineering | * | ||
| PHD-Management | |||
| PHD-Manufacturing Eng after UG | * | ||
| PHD-Manufacturing Engineering | * | ||
| PHD-Materials Sci.&Engineering | |||
| PHD-Mathematics | |||
| PHD-Mechatronics | * | ||
| PHD-Mechatronics after UG | * | ||
| PHD-Physics | |||
| PHD-Physics after UG | |||
| PHD-Social Psychology | |||
| PHDBIO after UG | * | ||
| PHDCYSEC after UG | * | ||
| PHDEECS after UG | * | ||
| PHDEPSY after UG | |||
| PHDIE after UG | * | ||
| PHDMAN after UG | |||
| PHDMAN after UG-Finance | |||
| PHDMAN after UG-Man. and Org. | |||
| PHDMAN after UG-Op.&Sup. Cha. | |||
| PHDMAN-Finance Area | |||
| PHDMAN-Man. and Org. Area | |||
| PHDMAN-Op. & Supp. Chain Area | |||
| PHDMAT after UG | * | ||
| PHDMATH after UG | |||
| PHDSPSY after UG |
CONTENT
OBJECTIVE
Refer to the course content
LEARNING OUTCOME
To be able to explain what MEMS and microsystems are.
To explain the working principles of many MEMS and microsystems in the
marketplace.
To understand the relevant engineering science topics relating to MEMS and
microsystems.
To be able to distinguish the design, manufacture and packaging techniques applicable to microsystems from those for integrated circuits.
To become familiar with the materials, in particular, silicon and its compounds for MEMS.
To be able to explain the basic and relevant design principles of MEMS and
microsystems.
To learn the scaling laws for miniaturization.
To be able to identify the optimal microfabrication and packaging techniques for micro devices and systems.
To be able to handle mechanical systems engineering design of micro scale devices.
To learn the fundamentals of nanotechnology.
Update Date:
ASSESSMENT METHODS and CRITERIA
| Percentage (%) | |
| Midterm | 30 |
| Exam | 25 |
| Individual Project | 35 |
| Homework | 10 |
RECOMENDED or REQUIRED READINGS
| Textbook |
* Foundation of MEMS, 2nd edition, by Chang Liu, Pearson, Essex, England, 2012. (ISBN-10: 0273752243, ISBN-13: 9780273752240) |
| Readings |
* MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering, * Fundamentals of Microfabrications: The Science of Miniaturization,? Marc J.Madou, Taylor & Francis, Inc., 2002 (ISBN 9780849308260 * Micromachined Transducers Sourcebook,? G. Kovacs, McGraw-Hill, 1998. * Microchip Fabrication,? 3rd ed., Peter van Zant, McGraw-Hill, 1997. |