Introduction to Microelectromechanical Systems (EE 404)

2021 Spring
Faculty of Engineering and Natural Sciences
Electronics Engineering(EE)
6.00 / 6.00 ECTS (for students admitted in the 2013-14 Academic Year or following years)
Murat Kaya Yapıcı,
Formal lecture,Recitation,Laboratory
Interactive,Project based learning,Simulation
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Fundamentals of MEMS fabrication techonology, sensor component design and system integration issues are main focus this course. Advantages and disadvantages, application (automotive, defense, aerospace, microfluidics, biotech, medical, etc.), commercialization, manufacturability, packaging, and interfacing of the techonology are also covered. A design project is assigned via case study in this class.


This course will cover the theory and principles of major sensing/actuation mechanisms (including electrostatic, piezoelectric, thermal, piezorezistive, electromagnetic) and electromechanical concepts which are relevant for the design of MEMS devices, micro sensors and actuators. The course will teach the basic design principles for MEMS and micro/nanoscale devices, will discuss the important application areas of MEMS (RF, Bio, Optics) and nanotechnology; as well as, the fundamental principles of microfabrication and micromachining techniques for micro/nano devices and systems.


To be able to explain the fundamental theory, design and working principles of Micro/Nano Electromechanical Systems (MEMS/NEMS) and microsystems.
To be able to identify optimal microfabrication, micromachining, packaging techniques and process flows for micro devices and systems; and distinguish the design, fabrication and packaging techniques applicable to microsystems from those for integrated circuits.
To be able to explain the different sensing an actuation methods including electrostatic, magnetic, piezoelectric, piezoresistive, thermal principles relevant to the design and operation of MEMS sensors and actuators.
To understand the relevant engineering science topics relating to MEMS and
microsystems, learn the scaling laws for miniaturization and be able to handle mechanical systems engineering design of micro scale devices.
To become familiar with the materials, in particular, silicon and its compounds for MEMS, and be able to identify the optimal materials for an intended application based on the fabrication requirements, material properties, and material compatibilities.
To learn the different application areas of MEMS and the MEMS technology market including RF-MEMS, BIO-MEMS and Optical MEMS (MOEMS).
To learn the fundamentals of nanotechnology, nanofabrication and the interplay between MEMS and nanosciences.


  Percentage (%)
Exam 5
Individual Project 50
Written Report 35
Homework 10



*Foundations of MEMS, 2nd edition, by Chang Liu, Pearson, Essex, England, 2012. (ISBN-10: 0273752243, ISBN-13: 9780273752240)


*MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering,
2nd edition, by Tai-Ran Hsu, John Wiley & Sons, Inc., Hoboken, NJ. 2008
(ISBN 978-0-470-08301-7)

* Fundamentals of Microfabrications: The Science of Miniaturization,? Marc J.Madou, Taylor & Francis, Inc., 2002 (ISBN 9780849308260

* Micromachined Transducers Sourcebook,? G. Kovacs, McGraw-Hill, 1998.

* Microchip Fabrication,? 3rd ed., Peter van Zant, McGraw-Hill, 1997.