Foundations of Microsystems (ME 409)

2021 Fall
Faculty of Engineering and Natural Sciences
Mechatronics(ME)
3
6.00 / 7.00 ECTS (for students admitted in the 2013-14 Academic Year or following years)
Ali Koşar -kosara@sabanciuniv.edu,
English
Undergraduate
--
Formal lecture,Interactive lecture,Seminar,On-line task/distance
Interactive,Learner centered,Communicative,Discussion based learning,Task based learning
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CONTENT

This course deals with modeling micromechanical systems, micromotion, and transport in the microscopic world. Spacific topics include: micron and sub-micron positioning technology; ultra precision; kinematics and dynamics of micromotion; modeling microactuators and microsensors; micro-flows and heat transfer; MEMS CAD systems.

OBJECTIVE

* To give a broad introduction to microsystems technology
* To give students an opportunity to study the current literature
* To provide understanding in theory and analysis on microsystems
* To help students gaining insight into microsystems design

LEARNING OUTCOME

Comprehend microsystems technology (Program outcome1)
Show knowledge on basic solid mechanics and fluid mechanics in microdomains (Program outcome 1)
Gain broad information on the current literature about microsystems (Program outcome 1)
Define important issues on microsystems design and working principle of microsystems (Program outcome 2)
Choose appropriate fabrication method of any microsystem (Program outcome 2)
Use suitable tools to analyze and model microsystems (Program outcome 2)
Choose appropriate material for any microsystem and packaging method any microsystem (Program outcome 2)
Improve their skills using computer tools such as MATLAB and COMSOL to solve solid mechanics and fluid flow problems through a term project (Program outcome 2)
Develop skills to analytically and numerically model microsystems (Program outcome 2)
Develop problem solving and designing skills (Program outcome 2)
Use their knowledge on thermal fluid science and solid mechanics to design viable microsystems (Program outcome 2)

ASSESSMENT METHODS and CRITERIA

  Percentage (%)
Exam 60
Homework 40

RECOMENDED or REQUIRED READINGS

Readings

Microsystems Design, Stephen D. Senturia, 2001, ISBN 0792372468

Journals:
? J. Microelectromechanical Systems (IEEE/ASME)
? Sensors and Actuators (Elsevier)
? J. Micromechanics and Microengineering (IOP)