Integrated Sensors (EE 534)

2021 Fall
Faculty of Engineering and Natural Sciences
Electronics Engineering(EE)
3
10.00
Canan Barıştıran Kaynak -canan.baristiran@sabanciuniv.edu,
English
Doctoral, Master
--
Formal lecture,On-line task/distance,One-to-one tutorial,Group tutorial
Interactive,Communicative,Discussion based learning,Project based learning,Task based learning,Simulation
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CONTENT

Fundamental principles and design of integrated solid-state sensors and sensing systems. Micromachining and wafer bonding. Microstructures for the measurement of visible and infrared radiation, pressure, acceleration, temperature, gas purity, an ion concentrations. Merged process technologies for sensors and circuits. Data acquisition circuits, micro-actuators and integrated microsystems.

OBJECTIVE

A detailed analyses of basics of micro sensors. Performance parameters of different type of sensors with the state of the art comparison. detailed understanding of different type of sensors starting with resistive, capacitive, piezoelectric, magnetic, pressure and thermal type of sensors. The interface and readout electronic circuit type in order to convert the signal into electrical signal discussed. an introduction to the state of the art and future smart systems is given and followed by the latest integrated sensors into BiCMOS process. detailed process flow for BiCMOS integration of sensors is enriched with different type of simulation tools. A full design/fabrication of an BiCMOS embedded RFMEMS swtich is given starting from literature/IP search to the final characterization and commercialization.

LEARNING OUTCOME

Understanding basics of different type of sensors (i.e. resistive, capacitive, pressure etc..)
Understanding the different read-out circuits for sensors
Getting hands-on experince with different softwares for sensors design (i.e. Ansys, HFSS, Comsol, Cadence, ADS etc...)

ASSESSMENT METHODS and CRITERIA

  Percentage (%)
Term-Paper 75
Presentation 25

RECOMENDED or REQUIRED READINGS

Textbook

Handbook of Modern Sensors Physics, Designs, and Applications; Jacob Fraden
Microsensors, New York: IEEE Press, R.S. Muller
Semiconductor Sensors, S. M. Sze

Readings

Sensors: Engineering Structures and Materials from Micro to Nano by Joseph R. Stetter, Peter J. Hesketh, and Gary W. Hunter
IEEE Transaction on Electron Devices, Digest of Technical Papers, International Conferences on Solid-State Sensors and Actuators