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NT 502 Micro/ Nanofabrication Select Term:
This module covers i) the fundamentals of shaping materials at micro and nanoscale (e.g, diffusion, etching, and oxidation), ii) lithography, material deposition, pattern transfer, and metrology, iii) charged particles lithography (e.g., e-beam and focused ion beam lithography), iv) scanning probe microscopy-based fabrication techniques (e.g., dip-pen nanolithography and nanografting), v) nanoimprint lithography and step-and-flash lithography, vi) unconventional fabrication techniques (e.g., nanoskiving and nanosphere lithography), vii) self-assembly, templated/directed self-assembly and soft-lithography, viii) bulk and surface micromachining, and ix) 3D printing. The module will also pay specific attention to the applications of micro/nanofabricated devices.
SU Credits : 3
ECTS Credit : 6
Prerequisite : -
Corequisite : -