EE 626 Microelectromechanical Systems (MEMS) Select Term:
The course includes a summary of integrated circuit fabrication technologies leading into an overview of the technologies available to shape electromechanical elements on a submillimeter scale. Physics of MEMS devices will be covered at a level necessary to design and analyze new devices and systems. Electronic interfacing, mechanical and electrical noise, fundamental limits of CAD tools, layout, process simulation.
SU Credits : 3
ECTS Credit : 10
Prerequisite : -
Corequisite : EE 626L