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EE 534 Integrated Sensors Select Term:
Fundamental principles and design of integrated solid-state sensors and sensing systems. Micromachining and wafer bonding. Microstructures for the measurement of visible and infrared radiation, pressure, acceleration, temperature, gas purity, an ion concentrations. Merged process technologies for sensors and circuits. Data acquisition circuits, micro-actuators and integrated microsystems.
SU Credits : 3.000
ECTS Credit : 10.000
Prerequisite : -
Corequisite : -