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EE 533 Semiconductor Process Technology Select Term:
Theoretical analysis of the chemistry and physics of process technologies used in micro-electronics fabrication. Topics include semiconductor growth, material characterization, lithography tools, photo-resist models, thin film deposition, chemical etching, plasma etching, electrical contact formation, microstructure processing and process modeling.
SU Credits : 3
ECTS Credit : 10
Prerequisite : -
Corequisite : EE 533L