EE 533 Semiconductor Process Technology Select Term:
Theoretical analysis of the chemistry and physics of process technologies used in micro-electronics fabrication. Topics include semiconductor growth, material characterization, lithography tools, photo-resist models, thin film deposition, chemical etching, plasma etching, electrical contact formation, microstructure processing and process modeling.
SU Credits : 3.000
ECTS Credit : 10.000
Prerequisite : -
Corequisite :
EE 533L