MAT406 will detail top down and bottom up approaches for
nanoengineered systems fabrication. It covers
nanolitography / nanofabrication techniques, the
fundamentals of shaping materials, nanoscale,
lithography, nanoimprint lithography, step-and-flash
lithography, unconventional fabrication techniques, charged
particles lithography, and metrology. Etching,
patterning and pattern transfer. Bottom up approaches, such
as CVD, ALD, surface functionalization and
and patterning. Self-assembly techniques, like atomic,
polymeric, colloidal, biological, interfacial. 3D printing.
Nanostructured materials synthesis as building blocks of
nanosystems such as; nanoparticle, nanotube,
nanosheet, vesicle, wire etc. Nanomedicine, drug delivery
systems and nanosystems for clinical diagnostics.
Health and safety aspects of nanoengineering fabrication
methods.
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