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Code EE 404
Term 201602
Title Introduction to Microelectromechanical Systems
Faculty Faculty of Engineering and Natural Sciences
Subject Electronics Engineering(EE)
SU Credit 3
ECTS Credit 6.00 / 6.00 ECTS (for students admitted in the 2013-14 Academic Year or following years)
Instructor(s) Murat Kaya Yap?c? mkyapici@sabanciuniv.edu,
Detailed Syllabus
Language of Instruction English
Level of Course Undergraduate
Type of Course Click here to view.
Prerequisites
(only for SU students)
--
Mode of Delivery Formal lecture,Recitation,Laboratory
Planned Learning Activities Interactive,Project based learning,Simulation
Content

Fundamentals of MEMS fabrication techonology, sensor component design and system integration issues are main focus this course. Advantages and disadvantages, application (automotive, defense, aerospace, microfluidics, biotech, medical, etc.), commercialization, manufacturability, packaging, and interfacing of the techonology are also covered. A design project is assigned via case study in this class.

Objective

This course will cover the theory and principles of major sensing/actuation mechanisms (including electrostatic, piezoelectric, thermal, piezorezistive, electromagnetic) and electromechanical concepts which are relevant for the design of MEMS devices, micro sensors and actuators. The course will teach the basic design principles for MEMS and micro/nanoscale devices, will discuss the important application areas of MEMS (RF, Bio, Optics) and nanotechnology; as well as, the fundamental principles of microfabrication and micromachining techniques for micro/nano devices and systems.

Learning Outcome

To be able to explain the fundamental theory, design and working principles of Micro/Nano Electromechanical Systems (MEMS/NEMS) and microsystems.
To be able to identify optimal microfabrication, micromachining, packaging techniques and process flows for micro devices and systems; and distinguish the design, fabrication and packaging techniques applicable to microsystems from those for integrated circuits.
To be able to explain the different sensing an actuation methods including electrostatic, magnetic, piezoelectric, piezoresistive, thermal principles relevant to the design and operation of MEMS sensors and actuators.
To understand the relevant engineering science topics relating to MEMS and
microsystems, learn the scaling laws for miniaturization and be able to handle mechanical systems engineering design of micro scale devices.
To become familiar with the materials, in particular, silicon and its compounds for MEMS, and be able to identify the optimal materials for an intended application based on the fabrication requirements, material properties, and material compatibilities.
To learn the different application areas of MEMS and the MEMS technology market including RF-MEMS, BIO-MEMS and Optical MEMS (MOEMS).
To learn the fundamentals of nanotechnology, nanofabrication and the interplay between MEMS and nanosciences.

Programme Outcomes
 
Common Outcomes For All Programs
1 Understand the world, their country, their society, as well as themselves and have awareness of ethical problems, social rights, values and responsibility to the self and to others. 4
2 Understand different disciplines from natural and social sciences to mathematics and art, and develop interdisciplinary approaches in thinking and practice. 5
3 Think critically, follow innovations and developments in science and technology, demonstrate personal and organizational entrepreneurship and engage in life-long learning in various subjects. 5
4 Communicate effectively in Turkish and English by oral, written, graphical and technological means. 5
5 Take individual and team responsibility, function effectively and respectively as an individual and a member or a leader of a team; and have the skills to work effectively in multi-disciplinary teams. 4
Common Outcomes ForFaculty of Eng. & Natural Sci.
1 Possess sufficient knowledge of mathematics, science and program-specific engineering topics; use theoretical and applied knowledge of these areas in complex engineering problems. 5
2 Identify, define, formulate and solve complex engineering problems; choose and apply suitable analysis and modeling methods for this purpose. 4
3 Develop, choose and use modern techniques and tools that are needed for analysis and solution of complex problems faced in engineering applications; possess knowledge of standards used in engineering applications; use information technologies effectively. 3
4 Ability to design a complex system, process, instrument or a product under realistic constraints and conditions, with the goal of fulfilling specified needs; apply modern design techniques for this purpose. 5
5 Design and conduct experiments, collect data, analyze and interpret the results to investigate complex engineering problems or program-specific research areas. 5
6 Knowledge of business practices such as project management, risk management and change management; awareness on innovation; knowledge of sustainable development. 4
7 Knowledge of impact of engineering solutions in a global, economic, environmental, health and societal context; knowledge of contemporary issues; awareness on legal outcomes of engineering solutions; understanding of professional and ethical responsibility. 4
Electronics Engineering Program Outcomes Core Electives
1 Use mathematics (including derivative and integral calculations, probability and statistics), basic sciences, computer and programming, and electronics engineering knowledge to design and analyze complex electronic circuits, instruments, software and electronics systems with hardware/software. 5
2 Analyze and design communication networks and systems, signal processing algorithms or software using advanced knowledge on differential equations, linear algebra, complex variables and discrete mathematics. 2
Mechatronics Engineering Program Outcomes Core Electives
1 Familiarity with concepts in statistics and optimization, knowledge in basic differential and integral calculus, linear algebra, differential equations, complex variables, multi-variable calculus, as well as physics and computer science, and ability to use this knowledge in modeling, design and analysis of complex dynamical systems containing hardware and software components. 2
2 Ability to work in design, implementation and integration of engineering applications, such as electronic, mechanical, electromechanical, control and computer systems that contain software and hardware components, including sensors, actuators and controllers. 5
Materials Science and Nano Engineering Program Outcomes Area Electives
1 Applying fundamental and advanced knowledge of natural sciences as well as engineering principles to develop and design new materials and establish the relation between internal structure and physical properties using experimental, computational and theoretical tools. 4
2 Merging the existing knowledge on physical properties, design limits and fabrication methods in materials selection for a particular application or to resolve material performance related problems. 5
3 Predicting and understanding the behavior of a material under use in a specific environment knowing the internal structure or vice versa. 3
Molecular Biology, Genetics and Bioengineering Program Outcomes Area Electives
1 Comprehend key concepts in biology and physiology, with emphasis on molecular genetics, biochemistry and molecular and cell biology as well as advanced mathematics and statistics. 2
2 Develop conceptual background for interfacing of biology with engineering for a professional awareness of contemporary biological research questions and the experimental and theoretical methods used to address them. 4
Assessment Methods and Criteria
  Percentage (%)
Midterm 30
Exam 15
Individual Project 40
Homework 15
Recommended or Required Reading
Textbook

*Foundations of MEMS, 2nd edition, by Chang Liu, Pearson, Essex, England, 2012. (ISBN-10: 0273752243, ISBN-13: 9780273752240)

Readings

*MEMS & Microsystems Design, Manufacture, and Nanoscale Engineering,
2nd edition, by Tai-Ran Hsu, John Wiley & Sons, Inc., Hoboken, NJ. 2008
(ISBN 978-0-470-08301-7)

* Fundamentals of Microfabrications: The Science of Miniaturization,? Marc J.Madou, Taylor & Francis, Inc., 2002 (ISBN 9780849308260

* Micromachined Transducers Sourcebook,? G. Kovacs, McGraw-Hill, 1998.

* Microchip Fabrication,? 3rd ed., Peter van Zant, McGraw-Hill, 1997.