Course Catalog

EE 404 Introduction to Microelectromechanical Systems	3 Credits
Fundamentals of MEMS fabrication techonology, sensor component design and system integration issues are main focus this course. Advantages and disadvantages, application (automotive, defense, aerospace, microfluidics, biotech, medical, etc.), commercialization, manufacturability, packaging, and interfacing of the techonology are also covered. A design project is assigned via case study in this class.
Last Offered Terms Course Name SU Credit Spring 2023-2024 Introduction to Microelectromechanical Systems 3 Spring 2022-2023 Introduction to Microelectromechanical Systems 3 Spring 2021-2022 Introduction to Microelectromechanical Systems 3 Spring 2020-2021 Introduction to Microelectromechanical Systems 3 Spring 2019-2020 Introduction to Microelectromechanical Systems 3 Spring 2018-2019 Introduction to Microelectromechanical Systems 3 Spring 2017-2018 Introduction to Microelectromechanical Systems 3 Spring 2016-2017 Introduction to Microelectromechanical Systems 3 Spring 2015-2016 Introduction to Microelectromechanical Systems 3 Fall 2012-2013 Introduction to Microelectromechanical Systems (EL404) 3 Fall 2011-2012 Introduction to Microelectromechanical Systems (EL404) 3 Fall 2009-2010 Introduction to Microelectromechanical Systems (EL404) 3 Fall 2008-2009 Introduction to Microelectromechanical Systems (EL404) 3 Fall 2007-2008 Introduction to Microelectromechanical Systems (EL404) 3 Fall 2006-2007 Introduction to Microelectromechanical Systems (EL404) 3 Spring 2005-2006 Introduction to Microelectromechanical Systems (EL404) 3 Spring 2003-2004 Introduction to Microelectromechanical Systems (EL404) 3 Spring 2002-2003 Introduction to Microelectromechanical Systems (EL404) 3
Prerequisite: ENS 203 - Undergraduate - Min Grade D
Corequisite: EE 404L
ECTS Credit: 6 ECTS (6 ECTS for students admitted before 2013-14 Academic Year)
General Requirements: